Earmark - Advanced Lithography Thin Film Excellence

Agency:		Department of Defense--Military
Bureau:		Research, Development, Test, and Evaluation
Account:		Research, development, test, and evaluation, Defense-wide (97-0400)
Certifying Official:		Deputy Comptroller Program/Budget
Contact Information:		http://WWW.DOD.GOV 703-697-5131

Advanced Lithography Thin Film Excellence

1 recipient will receive $3,850,000.

Year Enacted: 2005

Description: Develop new fabrication processing techniques for lithography systems

Beneficiary/Recipient	Amount ($K)	Program	Type	Address
JMAR/SAL Nanolithography, Inc.	$3,850		For-Profit	South Burlington, VT

Citation

Source: Appropriations Report Language - Conference

Reference: 108-622

Location: Line 40, Page 347

Citation Excerpt: Advanced Lithography Thin Film Excellence

Last Modified: 16-Apr-2007