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Agency:    Department of Defense--Military
Bureau:    Research, Development, Test, and Evaluation
Account:    Research, development, test, and evaluation, Defense-wide (97-0400)
Certifying Official:    Deputy Comptroller Program/Budget
Contact Information:    http://WWW.DOD.GOV   703-697-5131
Advanced Lithography Thin Film Excellence

1 recipient will receive $3,850,000.
Year Enacted: 2005
Description: Develop new fabrication processing techniques for lithography systems
Beneficiary/Recipient Amount ($K) Program Type Address
JMAR/SAL Nanolithography, Inc. $3,850 For-Profit
South Burlington, VT
Source: Appropriations Report Language - Conference
Reference: 108-622
Location: Line 40, Page 347
Citation Excerpt: Advanced Lithography Thin Film Excellence

Last Modified: 16-Apr-2007

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