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Agency:    Department of Defense--Military
Bureau:    Research, Development, Test, and Evaluation
Account:    Research, development, test, and evaluation, Army (21-2040)
Certifying Official:    Deputy Comptroller Program/Budget
Contact Information:    http://WWW.DOD.GOV   703-697-5131
E-Beam Reticle & Lithography Inspection

1 recipient will receive $6,132,000.
Year Enacted: 2005
Description: Development of a prototype electron beam reticle and lithography inspection tool.
Beneficiary/Recipient Amount ($K) Program Type Address
KLA $6,132 For-Profit
San Jose, CA
Source: Appropriations Report Language - Conference
Reference: 108-622
Location: Line 19, Page 253
Citation Excerpt: E-Beam Reticle & Lithography Inspection

Last Modified: 16-Apr-2007

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