Description: This project developed the imprint lithography process issues relating to fluid delivery, imprinting and in-liquid alignment while keeping the constraints of interferometric mag-lev stages in mind. This project built on unique capabilities in the motion systems area that were previously developed.
|
|
|
SPACE AND NAVAL WARFARE SYSTEMS CENTER SAN DIEGO |
$2,675 |
|
Federal |
SAN DIEGO,
CA
|
NAVAL RESEARCH LABORATORY |
$0 |
|
Federal |
WASHINGTON,
DC
|
MOLECULAR IMPRINTS, INC |
$0 |
|
For-Profit |
AUSTIN,
TX
|
|
Citation
|
Source:
Appropriations Report Language - Conference
|
Reference:
108-622
|
Location:
Line 206, Page 309
|
Citation Excerpt: Nano-Imprint at Manufacturing Scale
|
|