Description: This effort commissioned a deposition system for oxide component deposition and quantified growth parameter variables. Grew test structures for initial calibration and feedback for optimization of deposition parameters.
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CARNEGIE MELLON UNIVERSITY |
$0 |
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Public Educational Institution |
PITTSBURGH,
PA
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ARIZONA BOARD OF REGENTS FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY |
$0 |
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Public Educational Institution |
TEMPE,
AZ
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THE PENNSYLVANIA STATE UNIVERSITY APPLIED RESEARCH LABORATORY |
$1,640 |
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Public Educational Institution |
UNIVERSITY PARK,
PA
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Citation
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Source:
Appropriations Report Language - Conference
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Reference:
108-622
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Location:
Line 4, Page 284
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Citation Excerpt: Device Integration of WBG Semiconductors and Crystalline Oxides
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